2 late 5500-EZ and one timely 5500-EZ

Owner-only plan didn't file 5500-EZ in 2021 or 2022.  Is it recommended to file the two late 5500-EZs separate from the timely filed 2023 Form 5500-EZ?  It seems to me that filing them all together would make more sense since there wouldn't be a situation where the timely form is processed before the late forms, resulting in correspondence.  Thanks for your input.

I would do them separately. Why would you include a timely filing with a late filing. Perhaps you extend 2023 and file it in October. 
 

But go ahead and submit the two late ones as soon as you can. 
 

https://www.irs.gov/retirement-plans/penalty-relief-program-for-form-5500-ez-late-filers